Researchers from thePolytechnic University of Turin和耶路撒冷希伯来大学已经使用了3D打印技术来实现纳米电机机电系统（NEMS）的新性能。
The production of conventional semiconductor-based NEMS usually involves a highly complex, multi-step, and costly fabrication process. While alternative methods such as screen printing, hot embossing, micro-injection molding, and even 3D printing have been trialed, they’re usually limited to the micro range (MEMS) and deliver relatively low-quality factors.
在这里，联合研究团队利用了两光量聚合（一种非常精确的SLA形式），将其与基于硅基硅相媲美的3D打印刚性固有的谐振器具有可比性的性能。通过为半导体谐振器提供可行的，低成本的替代方案，预计这项工作将为高度敏感的质量和力传感器等新应用铺平途径。
一个越来越少的世界
自从数字时代开始以来，我们已经倾注了大量资源，以使我们的电气和电子设备微型化，以使它们更轻，更便携，更易于存储。这用于消费电子产品，例如智能手机，但也适用于更面向行业的系统，例如传感设备。在后者的情况下，微型化也是性能的直接组成部分。
Looking at high-performance mass and force detection, specifically, the lower limits of sensitivity in these types of sensors are determined by two factors: a tiny resonator mass and a high-quality factor ‘Q’.
The small mass allows for small perturbations to induce large resonance frequencies, while the high-quality factor Q means energy is retained for longer in the resonance mode, dampening the effects of smaller frequency fluctuations that would otherwise hide the true values of the larger perturbations. All in all, these two factors make for more precise sensors.
Two-photon polymerization for NEMS
Unfortunately, achieving low masses and high Q in nano-scale sensing devices has historically required expensive and highly complex manufacturing approaches, which often also result in low fabrication yields. To challenge this, the research team employed the use of aNanoscribe光子专业GT 3 d打印机and a specially developed liquid ink made of metal salts.
After printing the NEMS resonator structures with the ink, the team heated the samples in a tube furnace for several hours to remove the organic content and increase the density of the metal precursors. This resulted in a set of rigid ceramic structures with high Young’s modulus and low damping characteristics.
团队报告说,他们的3 d打印NEMS的原因ators delivered quality factors of up to 15,000 and tiny mass sensitivities of 450zg, which are indeed in line with the performances of conventional silicon-based NEMS resonators.
Further details of the study can be found in the paper titled ‘使用3D打印的纳米力学谐振器达到基于硅的NEMS表演’.
The 3D printing of sensing components is an ever-growing application in the field of additive manufacturing. Last month, engineers atWashington State University(WSU) and DL ADV-Tech developed 3D printed sensors capable ofdetecting exposure to the herbicide glyphosate, which is thought to be carcinogenic. Integrated into a test kit, the 3D printed sensors are low-cost and don’t require special storage, making them an ideal tool for measuring exposure to harmful chemicals.
在其他地方，研究人员在圣克拉拉大学recently used 3D printing to build an upgraded version of the在农业灌溉系统中部署的水合感应单元。通过重新设计这些传感器的重新设计和3D打印部分，工程师能够提高其热检测功能，并缩小其整体尺寸。
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特色图显示了光子专业GT2 3D打印机。通过Nanoscribe的照片。
